Electrically coupled MEMS bandpass filters Part I: With coupling element

This paper, the first of the two parts, presents coupling techniques for implementation of high order narrow-bandwidth bandpass filters from micromechanical resonators using electrical coupling elements. Active and passive coupling elements are used in this work to implement high order resonant systems from individual MEMS resonators. The concept of passive coupling of resonators using capacitors as the coupling elements for filter synthesis and its electromechanical modeling is presented. Active coupling of resonators using transistor-based amplifying circuits is introduced and demonstrated as well. Capacitively coupled bandpass filters with integrated coupling capacitors and filter quality f a ©